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Do not attempt to use with other gases unless accurate conversion data for N 2 to the other gas is properly used. KJL205A Series Manual KJL205A Series Troubleshooting Guide. Additional KJL-6000SS sensors should be purchased as necessary. 4 4 Section 2: Quick Start A simple and intuitive gauge, yet modern implementation. Unpack and Confirm: verify you ve received everything you ordered The vacuum instrument contains the following components: 1. Vacuum gauge with an international power supply, and 10 of sensor cable with Octal connector 2. Thermocouple Vacuum Gauge Tube if ordering anything but KJL-205ANT 3. Quick Start guide or (this) User Manual KJL-205ABM KJL-205A Easy to use steps: 1. Plumb the thermocouple sensor into the system to be measured, taking care to keep the stem down 2. Install the display into its table top or benchtop location 3. Connect the power and gauge tube 4. Read vacuum! 5 5 Section 3: Installation If the KJL-205A or KJL-205ANT is purchased, it needs to be mounted. Please use the graphic below for guidance. 6 6 Section 4: Connections The only required connections for operations are power and sensor. The connections are already made in the KJL-205ABM and KJL-205ABM3X units that come fully installed in a metal enclosure, and there is no need to disassemble the unit. The only reason you would disassemble a KJL-205ABM or KJL-205ABM3X enclosure would be to access the analog output and relay connections. To set the set point: 7 7 Step 1. Press the set point switch. This redirects the meter movement to be controlled by the potentiometer adjustment. Step 2. While pressing the set point switch, adjust the set point adjustment until the meter movement indicates the vacuum level at which that you d like the relay to activate. Step 3. Release the switch. The relay may turn on or off a device depending on how it is wired to the type C contacts. Below is a description of type C contacts: 1. Common The common connection of a switch or circuit. 2. N.C.
Normally closed. This means that above the set point value there is a current path between the common and the N.C. terminal. Put another way the switch is ON between these 2 terminals. At the set point value and below (higher vacuum, lower pressure) the connection is open. Put another way, the switch is OFF between the common and the N.C. connection at higher vacuum (a lower vacuum reading). 3. N.O. Normally open. This means that above the set point value there is no current path between the common and N.O. connection. Put another way the switch is OFF between these 2 terminals. When the vacuum indication goes below the set point value (higher vacuum, lower pressure) the current path closes. Put another way the switch is ON between the N.C. and N.O. connections at absolute vacuum readings below the set point value. Section 6: Analog Out This gauge is equipped with an analog voltage output to indicate the pressure level. This analog output uses voltage to simply communicate with PLCs, PCs and other control systems. Below are some sample readings: Volts millitorr mbar Pa 8 8 Section 7: Field Calibration The KJL-205 family of products can be calibrated in the field provided that an accurate vacuum instrument standard exists. Typically, that instrument standard should be 4x as accurate, or at the very least much more accurate than the KJL-205A. System must be 9 9 Is the KJL-6000SS Sensor good? 1. Verify 18-20ohm resistance between pins and 5 2. Verify ohm resistance between pins 3 and 7 If zero ohms or open circuit is read, the tube will need to be replaced 5 3 When I first turn the unit on, it starts near ATM, then slowly moves down When I switch between sensors in the KJL- 205ABM3X, the needle starts high, then settles in to vacuum reading. This is normal operation due to the initial heating of the filament This is normal operation due to the initial heating of the filament.
Section 9: Servicing and Maintenance Gauge tube servicing In many cases, a gauge tube may become fouled with oil or other foreign matter. It is often possible to restore the functionality of contaminated probes with cleaning. If the contaminant is known, the tube should be filled with a fluid that is known to be a solvent to that contaminant. As an example, ether is often effective in removing residues of some oils. Commercial carburetor cleaners are very powerful solvents and are highly effective against some contaminants. After cleaning with solvents, the gauge tube should be completely dried or flushed with a volatile solvent to assure that it is dry prior to reinstalling it. If this is not done, contamination of the system may result. Maintenance Your vacuum instrument should give you many years of trouble-free service. There are no regularly scheduled maintenance intervals. If consistent accuracy is required, it is recommended that the gauge, tube, cable and power supply be returned for a yearly calibration check. 10 10 Notes on calibration The instrument is calibrated in nitrogen, which has thermal properties virtually identical to air. Other gasses will affect the readings by an amount proportional to the thermal conductivity of the gases. In most cases, the gases present in a vacuum system will be air, nitrogen, or oxygen, and no appreciable errors will occur. Certain other gases, however, have thermal conductivity significantly greater than air and will cause the instrument to read higher than the actual amount of pressure. Examples of such gases are water vapor, fluorocarbon refrigerants, and acetone. Conversely, other gasses have thermal conductivity significantly lower than air and will cause the instrument to read lower than actual pressure. Examples of such gases include helium, oxygen and to a lesser extent, CO2.
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When interpreting readings using gasses other than air, it should be borne in mind that the Vacuum Gauge reads absolute pressure that is the opposite of vacuum. Thus, a lower numerical reading actually is a higher level of vacuum. Microns are not really a measure of vacuum at all, but rather of absolute pressure. The pressure of the atmosphere is or approximately 14.7 pounds per square inch at sea level. One TORR is an absolute pressure of one millimeter of mercury. A millitorr is equal to one thousandth of a TORR. A MICRON is the same as a millitorr. 13 13 This pressure is due to the weight of all of the air in the earth's atmosphere above any particular square inch. Atmospheric pressure varies greatly with altitude. It decreases approximately 1 inch of mercury per thousand feet of altitude. Below that, it is much more useful to talk in terms of absolute pressure, starting from absolute zero. User limitation: You may not modify, copy, distribute, transmit, display, perform, reproduce, publish, license, create derivative works from, transfer, or sell, any information, software, products or services obtained from or created by Kurt J. Lesker Company to any third party, without the express written consent of Kurt J. Lesker Company to do otherwise. Any violation of this provision shall give rise to an indemnification of Kurt J. Lesker Company by you, for any third party claims arising out of such violation. 1 Year LIMITED Warranty: All Kurt J. Lesker Company products are warranted against any manufactured defect for a period of (365) days from date of purchase, unless such product is a custom-work for you and not a standard Kurt J. Lesker Company product. Any product qualifying as a custom-work shall not be warranted against any defects for any purpose, and your acceptance of such custom-work shall relieve Kurt J. Lesker Company of any liability for any purpose. WITH THE EXCEPTION OF THE LIMITED WARRRANTY ABOVE, YOU AGREE ANY Kurt J.
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Lesker Company PRODUCT IS PROVIDED AS IS, EXCLUSIVE OF ANY WARRANTY, INCLUDING, WITHOUT LIMITATION, ANY IMPLIED WARRANTY OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE, NON-INFRINGEMENT, OR ANY OTHER WARRANTY, EXPRESSED OR IMPLIED. Limitation Of Liability: You agree and acknowledge, Kurt J. Lesker Company shall have no liability to you whatsoever for any direct, indirect, punitive, incidental, special consequential damages arising out of or connected with the use or misuse of its products. In particular, given the nature of Kurt J. Lesker Company products, you agree and acknowledge, under no circumstances whatsoever shall Kurt J. Lesker Company be liable to you for any consequential damages for damage to any non- Kurt J. Lesker Company product or service, arising from the failure, use or misuse of a Kurt J. Lesker Company product, including, but not limited to, any vacuum system, engine, vehicle, factory, or the like. Entire Obligation: These terms and conditions express the entire obligation of Kurt J. Lesker Company with respect to its products. If any part of these terms and conditions are deemed void, invalid, unenforceable or illegal, including, but not limited to, the warranty disclaimers, liability disclaimers and liability limitations set forth above, then the unenforceable clause or sentence may be disregarded with the remainder of these terms and conditions valid and enforced. In the event the unenforceable clause or sentence leaves a void in these terms and conditions, a provision closely matching the intent of the unenforceable provision should be deemed inherent within these terms and conditions, slightly modified to render such provision valid and enforceable. General: These terms and conditions are governed by the laws of the State of Pennsylvania, USA. You hereby consent to the exclusive jurisdiction and venue of the Courts of Pennsylvania, in all disputes arising out of or relating to the use of this product.
Use of this product is unauthorized in any jurisdiction that does not give effect to all provisions of these terms and conditions. Modification of Terms and Conditions: Kurt J. Lesker Company reserves the right to change the terms, conditions, and notices under which their products are offered. The SRMD is a digital panel meter with a bright 1 LED display for This manual is the best copy we could find; it may be incomplete or contain dated information. Installation and Operation Manual Users Manual The probe tip is electronically Tektronix products are covered by U.S. and foreign patents, issued and pending. Information in this Model 407780. Introduction Rosemount 8714D (Calibration Standard) Magnetic Flowtube Simulator User Guide FCC Radio Frequency Previous experience of networking will be beneficial The EZ40 detects the presence of combustible Model RH520 User Guide The 407780 with programmable integrating time Digital Remote Meter for Monitoring System Performance. Version: RM-1 Digital Remote Meter for Monitoring System Performance. Version: RM-1 1098 Washington Crossing Road Washington Crossing, PA 18977 USA www.morningstarcorp.com Dallas, Texas Dallas, Texas May, 2012 NEVER OPERATE THE SFS81 MANUALLY NEVER OPERATE THE SFS81 WITH PERSONEL IN THE WORKCELL DO NOT USE LUBRICATED AIR. This device requires If shipping All rights reserved. Your access to and use of this website The Global Clinical Research Management, Inc. Web Site is comprised of various Web pages operated by Global Clinical Research Management, This operating manual will provide a guide to installation and operation of the product. Please read thoroughly These limits are designed to provide reasonable protection User s Manual The Credit Control, LLC Web Site is offered User Guide The Conserve Valet Smart USB Charging Station charges up All rights reserved. No By using IRT s software (the Software ), you Thermal Imaging Camera Enclosure. Shop online at omega.
com SM No liability is assumed Page 2 2 Installation. Page 10 5 Troubleshooting Page This publication is protected by copyright and all rights are reserved. No part of it may be reproduced or transmitted by This Agreement is effective as of March MS900-X-AC-B-LS systems equipped with MX900 Micro Transceiver will Send and Receive. The model An ISO-9001 Certified Company Vacuum Regulators. Vacuum Breakers (Relief Valves) Vacuum Control Devices. Vacuum Terminology Conventional regulators and relief valves might be suitable for service if applied correctly. This section provides To use this website, you must agree to our Privacy Policy, including cookie policy. Discover everything Scribd has to offer, including books and audiobooks from major publishers. Start Free Trial Cancel anytime. Report this Document Download now Save Save Instrukcja En For Later 0 ratings 0 found this document useful (0 votes) 15 views 6 pages Instrukcja En Uploaded by AMOEB Description: BITURBO MANUAL Full description Save Save Instrukcja En For Later 0 0 found this document useful, Mark this document as useful 0 0 found this document not useful, Mark this document as not useful Embed Share Print Download now Jump to Page You are on page 1 of 6 Search inside document Browse Books Site Directory Site Language: English Change Language English Change Language Quick navigation Home Books Audiobooks Documents, active. When you absolutely depend upon vacuum processes, knowing the precise pressure is essential.The high-performance, high-capacity rack controller provides cost effective monitoring and control of multiple roughing, high vacuum and ultra high vacuum gauges in a standard half-rack package. The XGS-600 requires from 50 to 75 less rack space than other controllers. For systems and end-uses that require measurement and tracking of pressure, the XGS-600 provides power to, and records signals from multiple vacuum gauges.
In addition, the XGS-600 can also communicate pressure readings to other elements of a system to indicate a change in status triggered by set points, or to activate other elements, such as a high-vacuum pumps or valves. Using state-of-the-art signal processing electronics, the XGS-600 features fast signal response of less than 20msec while still allowing users to simultaneously operate up to twelve convection type gauges, or up to four hot filament or cold cathode gauges combined with four convection gauges in one unit. A programmable dot matrix LCD displays up to 8 gauges at one time and can be configured to a font viewable from 20 feet. Simple screen organization and navigation make the unit extremely easy to use. No manual is needed for operation.Pirani-like rapid response time of 0.2 seconds makes the CT-100 ideal for high productivity applications where process steps are critically time-dependent. Rapid response time enables fast-acting valves to protect turbo pumps from sudden inrush of gas. Two user-defined set points per gauge can trigger multiple process steps, alarms, or other pressure-related conditions. A selectable pressure range offers accurate and repeatable readings precisely where it is most critical to the user. The CT-100 operates over the full rough pressure spectrum, 1 ? 10 - 4 Torr up to 100 Torr or 20 mTorr to atmosphere. On-board LEDs give quick visual indication of vacuum status. The robust sensing element is three times thicker than typical gauges, minimizing sensitivity to process vibration, shock, and condensables, providing longer life and higher repeatability than traditional Pirani gauges. A single point calibration feature maintains gauge accuracy over time. The CT-100 is ideal for mass spectrometers and surface analysis equipment. For load locks, rapid 0.2 second response time and excellent repeatability make the CT-100 the ideal choice.
It provides inexpensive, accurate, gasspecies independent pressure measurement for a single di- aphragm gauge tube. Accurate, gas-species-independ- ent pressure readings can be provided over a range of more than 3 decades below Diaphragm Gauge Full Scale ratings of 100mTorr, 1 Torr, 10 Torr, 100 Torr and 1000 Torr. It operates with standard, unheated diaphragm tubes and has a process control set point. The 4-digit pressure displays 0000 to 1000 with a user-set decimal point. The analog output is linear, 10.0 volts full scale. The controller includes a power cord but the sensor tube not included,The unit has a choice of sensor response curves and covers 0.1 mTorr to 1000 Torr.The controller supports and automatically recognizes vacuum gauges from the Edwards range, with coverage from 2000 to 2 ?10 - 11 mbar. The TIC is available in three-channel, six-channel and six-channel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of six 250 VAC 5 amp changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations.The new gauge is lead-free, RoHS compliant and carries Canadian Safety Association approval. It is available in standard and corrosion-resistant versions. OEMs and system integrators will particularly like the APG100 for its compact size (41 ? 83 ? 30mm), linear output (one volt per decade) and replaceable sensor tube, all of which make it a cost-effective choice as a system component. The APG100 sensor tube is replaceable. If it should need to be changed, the tube is simply unclipped and replaced with a new one, with no need for special tools or training. The APG 100 is available in two versions; the APG100-XM is the standard version for measurement of vacuum to 10 - 3 mbar. The APG100-XLC measures vacuum down to 10 - 4 mbar and has a corrosion resistant filament for harsher environments.
It features a bright LED display and simple push-button controls. The ADC automatically recognizes compatible Edwards gauges, loads the appropriate lookup table and displays the pressure in commonly used vacuum units. When combined with a suitable gauge, such as the Edwards APG100 Pirani Gauge, APGX-H Convection Gauge or Wide Range Gauge (WRG), the ADC represents a cost effective means of monitoring and controlling process vacuum in a broad range of applications. An enhanced version of the ADC is also available which can accept two compatible Edwards gauges allowing control of for example an APG100 and an AIM Gauge from a single low cost controller. It also has two 48VDC relays rated at 1 amp for simple process control, and an RS232 interface for communication with a computer or PLC.Twin filament tungsten ion gauge tubes are generally used for ion implantation require- ments, broad range tubes are used for sputtering applications and burnout resistant thoria coated iridium filaments are used for general vacuum requirements. Thermocouple tubes are used for measuring mechanical pump vacuums in the range of 1000 to 1 micron. Convection tubes are used to measure vacuum from atmosphere to 10 - 3 with high accuracy. Fil-Tech also supplies a complete line of UHV and Bayard Alpert nude gauges and their replacement filaments. Fil-Tech also supplies 6MHz and 5MHz Quality Quartz Crystals, sensor heads and feedthroughs, rate monitors, electron beam gun replacement parts, ion source parts, fluids for pumps, and Alcatel and Varian leak detector filaments. Fil-Tech offers discounted pricing and stocks all gauges and parts. Contact Fil-Tech 800-743-1743 or visit www.filtech.com for cross reference and pricing information.Up to three setpoint control relays can be included to simplify process control functions.The FlexRax can also operate up to four convection gauges.
Additionally, the FlexRax can accept and display up to two analog input signals from other devices such as capacitance diaphragm gauges. The FlexRax easy to read LCD with backlighting provides a sharp contrast with wide viewing angle.The new OLED display offers a significant improvement over the previous LCD design. The new OLED display offers a very easy and intuitive user-friendly interface for readout of pressure, and for setup, calibration, and operation of the device. The Super Bee is powered by 11 to 30 VDC and provides a linear, non-linear or log-linear analog output, as well as RS232 and RS485 serial communications. Two process setpoint relays are included for controlling vac- uum system pump down and venting.When used with the CVG101 convection gauge, the VGC301 can measure pressures from 1000 to 10 - 4 Torr. The VGC301 is now offered with a bright, sharp and clear digital OLED graphical display. The new OLED display offers a significant improvement over the previous LCD design. The VGC301 is powered by 11 to 30 VDC and provides a linear, non-linear or log-linear analog output, as well as RS232 and RS485 serial communications. Two process setpoint relays are included for controlling vacuum system pump down and venting.Its wide measurement range and ability to simultaneously readout and control up to 6 sensors and gauges, combined with a broad range of features including RS232, RS485 and Profibus interfaces, a modular design allowing for easy and fast field upgrades and configuration changes and a leak test function, the 937B Combination Vacuum Gauge Controller is used in a vast array of vacuum and pressure measurement applications in research, industry, and high technology.
The 627C and 628C models, based on MKS’ standard capacitance sensor, and the E27C and E28C models, equipped with MKS’ patented Etch sensor that greatly reduces manometer drift in processes with condensable byproducts, are ideally suited for high-accuracy semiconductor, flat panel display, and industrial applications that require a heated manometer for repeatable vacuum and pressure measurement.The MicroPirani automatically monitors and controls the cold cathode sensor, ensuring optimal ignition pressure. The MicroPirani MEMS sensor technology is capable of measuring pressures 1-2 decades lower than traditional pirani gauges, enabling cold cathode activation at lower pressures that improves reliability and extends service intervals. Utilizing RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement readings, the 972B is designed for general purpose pressure measurement and control as a standalone unit or for use with the 937B Digital Combination Vacuum Gauge Controller. In addition, the 972 has up to three mechanical relays which can be used for process control and an analog voltage output that can be interfaced to external analog equipment for pressure readout or control. The 972B DualMag transducer’s wide measurement range, flexible communications capabilities and robust design make an ideal vacuum transducer for many different vacuum applications within the semiconductor, analytical and coating industries.This monitoring of pump down cycles provides the operator with data to quickly determine if there is a problem. Features of the GT 430 include two adjustable independent relay outputs, RS 232 serial interface, and Analogue output for remote display, monitoring or recording of the pressure reading. It uses the industry standard GT 034 thermistor sensor with encapsulated resistor bead.
This design has proven more rugged than a standard thermocouple sensor making it ideal for applications measuring in harsh environments.It is usable for panel mount or standalone. The two 40-segment bar graphs display both stations pressure simultaneously, providing a comparison of the sensor readings. Operating range is 1 mTorr to 5000 mTorr. Each station has an isolated relay with front panel adjustable trip points and status display, useful for controlling other devises or interlocking. It uses the industry standard GTC-036 Thermocouple sensor.We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single or dual tungsten and thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required.All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers.However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company has a 30-day money-back guarantee on this product, with no questions asked.Advanced digital electronics provide longterm gauge stability and rapid response time even when subjected to atmospheric pressure bursts or harsh processing environments.The CM52 Controller operates three channels including Pirani sensors on channel one and either Bayard Alpert or Extractor type sensors on channel 3. Ideally suited for a wide measurement range, the CM52 can be used in UHV and XHV applications and in radiation areas.
The TTR101 has the ability to detect a change in pressure in only 70 milliseconds, faster than predecessor model TTR100. An on-board digital display option avoids the need for a separate display unit. Optional display units for use in remote mounting are also available if desired. Two built-in relays are included for remote switching function output. The TTR101 has remote pressure signal monitoring output capability, 0 to 10 VDC logarithmic. The required supply voltage is 15 to 30 VDC.The output signal, which ranges from 0 to 10 volts, features an integral error signal, which guarantees secure and reliable measurement. The robust ceramic diaphragm design is less sensitive to process induced effects and can withstand millions of atmosphere cycles and bursts. Innovative signal processing produces an optimized measurement limit down to the smallest possible measured value of 10 - 5 mbar with high stability of the measured values.By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 5E-10 mbar with a single transducer. For additional control flexibility, Pfeiffer Vacuum offers a line of controllers, providing an analog output voltage representing pressure, plus control relays, simple calibration, and a digital readout of the vacuum level. ActiveLine is available in Piezo, Capacitance Diaphragm, Pirani, Cold Cathode, Process Ion, Full Range Cold Cathode and Full Range BA gauges.These instruments are accurate, affordable, easy to specify, and easy to use. These are intelligent gauges that can be used either standalone or with an Adixen gauge controller. Standalone, they can be supplied with 15 to 30 VDC and return a 0 to 10 V or RS485 signal. In addition, set points are available directly on the gauge head. All sensors in this series use the same pin outs on a D sub 9 pin connector, so the wiring is easy.
Alternatively, anAdixen ACS2000 single gauge controller or ACM2000 triple gauge controller can be used to display the pressures and power the gauges. These controllers come standard with 2 setpoints per channel, 0 to 10 V outputs, and RS232 communication. Any gauge can be plugged into either controller and the controller will automatically recognize the gauge type and correctly display the pressure. The 2000 series gauges include hot cathode ion gauges, cold cathode ion gauges, Pirani gauges and capacitance manometers. These gauges can cover the range of pressure measurements from atmosphere to 5 ? 10 - 10 mbar. The gauges and controllers can give you more than simple pressure measurements; they can drive a production process or display a pressure trend. These gauges are appropriate for use in vacuum coating, semiconductor manufacture, food packaging, cathode ray tube manufacturing, DVD production, electron microscopes, particle accelerators, semiconductor and almost all high vacuum applications.It enables highly quantifiable pressure measurements in a wide pressure range (10 - 2 to 10 - 11 Pa). The Ax-TRAN can be used for pressure measurements for high-energy accelerators, ultra-high and extreme high vacuum systems. Features include two independent set points, an easy-to-read 3-digit mantissa LED display and a wide pressure measuring range.This wide range gauge is also gas species independent, and unlike capacitance manometers, it is orientation insensitive, permitting mounting in any position. A platinum filament provides corrosion resistance making this gauge ideally suited for OEMs to use in semiconductor vacuum equipment as a low vacuum process control gauge. Sensor tubes are easily exchanged, and the unit is CE Marked and RoHS compliant.Calibration in mTorr is standard, but there is no charge for calibration in microns, mbar, or Pa ranges. A 3 ? digit LCD is available and all models provide both 0 - 10 VDC and 4-20 mA linear outputs for your PLC or data system.