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We'll send you a very cool gift! The UL5000 delivers fast response times in all measurement ranges and extremely short cycle times in reaching test conditions and final results. The specially designed vacuum architecture provides the continuous high helium pumping speeds and the extremely fast response times you demand. General We reserve the right to modify the design and the specified data. The illustrations are not binding. The autoranging feature of the UL5000 covers the entire range or leak rates depending on the selected operating mode. Not only the leak rate signal, but also the pressure in the test sample (inlet pressure P1) and the fore vacuum pressure (P2) are used for control purposes. The menu has a tree architecture. Default Status of the UL5000 when supplied by the factory. If it is contaminated also indicate the nature of the hazard. Caution The UL5000 is to be used for leak detection only. It must not be used as a pumping system (esp.Examine the shipping container for any external damage. Completely remove the packaging materials. The length of the sniffer line is 4m (i.e. 12 feet). 1.4.2.2 Toolbox The toolbox is a detachable compartment with a lockable lid. Fittings and small fixtures can be stored plus the hand set (See Chapter 1.4.2.5). This transportation fixing consists of 2 screws at chassis of the UL5000 (one on each side). To get access to these screws remove the side covers of the UL5000. For operation of the UL5000 the screws should be loosened. To loosen the screws first loosen the counter nut that is accessible from underneath: Fig. 2-2 Loosen the screws approximately 10 mm above the chassis plate anf tighten then. The air inlet as well as the air discharge openings must never be obstructed. Caution The UL5000 can be locked by arresting the castors of the front wheels to avoid movements on skewness. Caution Make sure that you can always reach the mains plug.
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It is recommended that you check all major helium sources in the vicinity of the UL5000 within a radius of about 10 m for the presence of any big leaks. You may use the sniffer probe for this. Operation of the UL5000 where the ground conductor has been left unconnected is not permissible. Tipp The power cord can be secured against coming out by using the power cord fixture as shown: Fig. GND24 3, 6 Input 4, 5, 7, 8 Output 2.3.2.2. If, in spite of this, hum interference is apparent it is recommended to operate the UL5000 and the chart recorder from the same mains phase. If this is not possible, you must make sure that the frame ground of both instruments is kept at the same potential. The size of the flange is DN 25 KF. Warning Risk of injury due to sucking connection flange (inlet port). If the Vacuum-Mode of the UL5000 is activated, the connection flange may suck bodily parts around the connection flange. Auto-scaling: Scaling logarithmic Display range: 4 decades Time axis: 32 seconds LCD invers: Background in stand by mode:. It is explained how to switch on the UL5000, how to measure and how to carry out an internal calibration. Notice: If anything unexpected happens during the initial operation or the leak detector acts in a strange way the UL5000 can be switched off by the mains switch at any time. The UL5000 is in Stand-by mode now. Fig. 3-1: Top view of the UL5000 Pos. Description Pos. Description Control Panel Inlet Port Check if the inlet port Fig. If you press STOP a few seconds the inlet of the UL5000 will be vented. For calibration proceed with First Operation Check. In addition the vacuum can be generated by pumps with are set up in parallel to the leak detector. These positively charged particles are accelerated into the magnetic field following a circular path, the radius of which depends on the mass-to-charge ratio of the ions.
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Only helium ions can pass this filter and reach the ion collector where the stream of the ions is measured as a electrical current. If the button is pressed longer the inlet is vented according to the conditions defined in the menu Vent delay. See Chapter 6.6.1.2 Vent delay to select the time parameters of the venting. The saved value will be reset to zero. The under- ground signal will not be suppressed anymore. Below 2 mbar the UL5000 will switch to FINE mode, i.e. V1a and V4a will open and valve V1b will close. The gas stream enters the turbo pump at an intermediate level. When pressing the START Button the system starts to pump air through the sniffer line. Due to the constant gas flow through the sniffer line the software will range through GROSS into FINE mode and stay there. Please connect the part to be tested to the inlet port and press START. The UL5000 starts to evacuate the part. The evacuation time depends on the volume of the test part. Calibration Please refer to Chapter 6.5. Settings of internal machine parameters. Settings Please refer to Chapter 6.6. Information on the UL5000 (electrical and Information vacuum data) and service menu. Please refer to Chapter 6.7. Access restrictions. Access Control Please refer to Chapter 6.8. Name Description Back Return to the main menu. Settings for bargraph and trend mode.During the run-up phase press the key no. 3 or 7 so long until the display can be read properly again. This means that if you press START when the value is underlined, the actual background signal will be subtracted. If you press START when the value is not underlined, the old background signal from the last Stand-by will be subtracted. Name Description Return to the main menu without any changes Cancel of the present settings. The normal vacuum mode will be used. If these levels are exceeded some outputs of the UL5000 will react, especially if Trigger 1 is exceeded.
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Display In the status line of the display the signs for Trigger 1 and Trigger 2 are displayed inverted if the leak rate exceeds (becomes higher than) the programmed value. If Trigger 2 is exceeded the corresponding relay will switch. This is also indicated at the display. Softkey 2: Pinpoint 6.4.6.1 See Chapter Softkey 3: Leak rate prop. The sound will be proportional to the leak rate signal. 6.4.6.2 See Chapter Softkey 6:. See Chapter 6.6.6 Description of the Menu. Softkey 2: Automatic purge (Purging) 6.6.1.1 Refer to Chapter Softkey 3: Vent delay Please refer to Chapter 6.6.1.2 Softkey 4: Booster TMP mode Please refer to Chapter. When the STOP button is pressed for a period of time which is shorter than the delay time specified here, the UL5000 will just change to Stand-by mode. Softkey 3: Background suppression Refer to Chapter 6.6.2.1 Softkey 4: Calculate inlet area background Refer to Chapter 6.6.2.2. This function helps to save clean up of the UL5000 after a helium contamination. Softkey 3: Off. The UL5000 must be in Stand-by. Softkey 2: H (2 amu) Hydrogen with the mass of 2 amu will be measured. Softkey 3: He (3 amu) Isotope of helium with the mass of 3 amu will be measured. The START, STOP and ZERO button at the machine are deactivated.Softkey 1: Cancel Return to the previous menu without any changes of the present settings. Softkey 2: Arrow up Adress recorder output 1 or 2 Softkey 3: Arrow down Adress recorder output 1 or 2. MEAS: The UL5000 is in the measure mode. When pressing the START button once again in the measure mode or activation of the START input at the DIGITAL IN port the leak rate will be send out. Softkey 6: 60 Hz The UL5000 will be run at a mains frequency of 60 Hz. If the service message is activated, the UL5000 reminds you of the required maintenance. Softkey 3: Off Softkey 5: Help. Thus no more Helium gets into the mass spectrometer. Helium that has gotten into the tool under test can be pumped away by the tool pump.
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The gross leak detection process operates in two steps and the limits can be adapted as required. Softkey 6: Calibration history The carried out calibrations will be listed. Softkey 7: Calibration factors The vacuum diagram of the UL5000 is shown. Here you can see which valves are opend or closed momentarily and more. Softkey 8: Service (See Chapter 6.7.1) Without device-PIN the UL5000 does not even switch on the pumps. After leaving the menu the same error message will be displayed again. Emission for cathode 1 can not not be switched on.W46 Emission for cathode 2 can Signal MSIBE on MSV board is not active. Emission can not be switched can not be switched on! on. Exchange the cathode by changing the ion source. After having exchanged the ion source it must be possible to switch on both cathodes manually via the service menu. The message will be displayed until the maintenance rate is met. If it is contaminated also indicate the nature of the hazard. For this you must use a Declaration of Contami- nation form Fig. Vacuum system Scroll pump IWATA Exchange the scrollmodule 200000021R ISP 500 Scroll pump Varian Exchange the Tip Seal 200001671 TS 620 Exchange the scrollmodule. Independently of 4000 working hours the lubricant reservoir of the Turbomolecular pump and the oil in the Fore pump should be replaced at least yearly. After 16000 working hours the bearing of the turbo pump and the different kind of fore pump will reach their expecting life time. Danger S TOP The protective conductor screw at the chassis plate should not be loosened. The operator is not protected against electric shock by working without a protective conductor line. Maintenance works. Screw the new exhaust filter onto the thread of the exhaust and tight it. Fig. 9-3 Replacing the exhaust silencer Pos. The maintenance work should be performed by the INFICON service or an authorized INFICON service partner. 9.10.
This function is run during the cali- bration process or when operating the start pushbutton, provided the UL5000 has been running previously for at least 20 seconds in the standby or vent mode. If the helium background previously suppressed should drop so that for the duration of the zero time only the display limit will be displayed, the zero level is adapted automati- cally. The menu has a tree architecture. The smallest detectable leak rate is 1?10 Detection limit is 1?10 The minimum detectable leak rate is The level of the internal helium background is measured in the Stand-by mode and subtracted from the measured signal. Micropirani Absolute Piezo Transducer Complete Spec Sheet (0) Micropirani Absolute Piezo Transducer Operational and Instruction Manual (0) KF25, KF40 Technical Specifications.pdf (0).
Don’t use the handle to lift. Caution Your feet can be pinched. Keep your feet away from the rollers.. Caution Your feet can be run over. Page 22 technical handbook Fig. 2-1 For transportation fixing the screws are tightened to the chassis plate. For operation of the UL1000 Fab the screws should be loosened. Fig. 2-2 22 Installation iina70e 02. Page 23 technical handbook Loosen the screws approximately 10 mm above the chassis plate and tighten then the counter nuts again: Fig. 2-3 For transportation tighten the screws again and fix them by the counter nuts. 2.2 Working Location Move the UL1000 and UL1000 Fab to the desired position and arrest the castors. (1408) STOP Danger Caution: Exhaust gases and fumes: Exhaust gases and fumes from oil-sealed pumps may be harmful to health. Page 24 The UL1000 and UL1000 Fab must not be operated while standing in water or when exposed to drip water. The same applies to all other kinds of liquids. Warning technical handbook Warning Avoid contact with bases, acids or solvents as well as exposure to extreme climatic conditions. Warning The UL1000 and UL1000 Fab is designed for indoor use only. Caution Ensure a sufficient air cooling. The air inlet as well the air discharge openings must never be obstructed. Page 25 technical handbook 2.3 Electrical Connections 2.3.1 Mains Power Notice: Generally the local regulations for electrical connections must be observed. Warning Before connecting the UL1000 and UL1000 Fab to the mains you must make sure that the mains voltage rating of the UL1000 and UL1000 Fab coincides with the locally available mains voltage. The instrument must exclusively be connected to a single phase supply with fuses for installation (Circuit breaker 16A max. The pin numbers are counted downwards. Page 28 2.3.2.1 Accessories Contact pins 1 and 3 are fused with a 0.8 A slow-blow fuse. The amount of power which can be drawn is limited to 10 W. The contacts are numbered from top to bottom.
GND24 Input Output technical handbook The following accessories may be connected to the sniffer line SL200 (Please refer to Chapter Fig. Page 29 CAL Request Is opend in case of calibration request. During external calibration a open output indicates that the external calibrated leak has to be closed.Warning Open when a warning is shown. Purge Closed when purge is active. Measure Closed in case a machine is in measure mode. Recorder Strobe Closed in case recorder output is invalid. The connection is made through a 9 pin sub-D socket. For more information refer to the Interface Description. Page 32 Vaccum Connections 2.4.1 Inlet Port The inlet port is located on the top of the UL1000 and UL1000 Fab. The size of the flange is DN 25 KF. Warning technical handbook 2.4 Risk of injury due to sucking connection flange. If the Vacuum-Mode of the UL1000 is activated, the connection flange may suck bodily parts around the connection flange. Keep bodily parts off the connection flange. A test object or a test chamber has to be connected to the inlet port if the vacuum mode is chosen (See Chapter 6.3). Page 33 2. Page 34 3 First Operation Check Notice: 3.1 If anything unexpected happens during the initial operation or the leak detector acts in a strange way the UL1000 and UL1000 Fab can be switched off by the mains switch at any time.It is explained how to switch on the UL1000 and UL1000 Fab, how to measure and how to carry out an internal calibration. The start up procedure takes about 3 minutes and the end is indicated by a beep. The UL1000 and UL1000 Fab is in Stand-by mode now. Fig. 3-1: Top view of the Standards Pos. Description Pos. Description 1 2 Control Panel Inlet Port 4 Check if the inlet port Fig. Page 36 technical handbook Fig. 3-2: Control Panel Pos. The vacuum is achieved with a pumping system that is part of the UL1000 and UL1000 Fab. In addition the vacuum can be generated by pumps with are set up in parallel to the leak detector. Page 39 4.2.
1 Vacuum System technical handbook The vacuum diagram below shows the major components inside the UL1000 and UL1000 Fab: Fig. 4-1: Vacuum Diagramm UL1000 and UL1000 Fab (1408) Pos. Page 40 With the pressure in the test part being lower than ambient pressure sprayed helium can penetrate into the part in case of a leakage. As soon as the pressure conditions allow it one of the valves to the TMP opens. Now Helium can penetrate into the mass spectrometer contrary to the pumping direction of the TMP. Page 42 technical handbook Fig. 4-3 decreasing background (1408) When the measurement signal declines below the saved underground value the underground value will automatically be equated with the measurement signal. As soon as the measurement signal is increasing again the saved decreasing value remains constant. This function is not depending on the operating mode when calibrating.Pushing the MENU button again leads back to the screen of the previous working mode. When pressing the START Button Valves V1a and V1b open and the sample is pumped down by the roughing pump (UL1000) or scroll pump (UL1000 Fab). Page 46 V1a V1a MS technical handbook Since the scroll pump continues to evacuate the test sample the inlet pressure p1 will continue to drop. Below 2 mbar the UL1000 and UL1000 Fab will switch to FINE mode, i.e. V4a will open and V1b will close. The gas stream enters the turbo pump at an intermediate level. When pressing the START Button the system starts to pump air through the sniffer line. Due to the constant gas flow through the sniffer line the software will range directly into FINE mode and stay there. The inlet pressure will not drop further down. Page 48 Operation of the UL1000 and UL1000 Fab The UL1000 and UL1000 Fab is switched on by pushing the mains switch (Please refer to Chapter 3.2.1 Start up and Measure). After less than 3 minutes, the start up is completed; the leak detector is then ready to be used for measurements (Standby mode).
Please connect the part to be tested to the inlet port and press START. The UL1000 and UL1000 Fab starts to evacuate the part. The evacuation time depends on the volume of the test part. Page 49 5.3 Display in stand-by mode technical handbook In stand by mode the states are shown in the lower edge of the display (see Chapter 5.4.3). Furthermore calibration (Please refer to Chapter 7) can also be started in stand by mode and purging, too (see Chapter 5.3.1) 5.3.1 Purging Every time when the UL1000 Fab changes into stand by mode it can start purging automatically after 20 seconds. The accoustic output can exceed a level of 85dB(A). Do only expose to the audio alarm for a short time or use ear protection. By pressing the corresponding softkeys (Soft Keys no. 2 and no. 3) the volume can be adjusted for convenient loudness. In the bottom line of the display another loud speaker symbol is shown, combined with a number. Page 51 5.4.4 Numerical Display Mode technical handbook The display shows the leak rate in big digital figures, see Fig. 5-1. The unit of the leak rate is shown, too. Underneath the leak rate the inlet pressure is displayed in smaller digits. The units of leak rate and pressure can be defined in the menu (See Chapter 6.4.4 Units). Below this the same leak rate is shown graphically as a bar. The scale of this bar, i.e. Page 52 6 Description of the Menu technical handbook By pressing the MENU push button Fig. 6-1 the main menu will be displayed regardless of the current working mode. Fig. 6-1: The Main Menu The main menu Fig. 6-1 leads the operator to several submenus described in the following chapters. 6.1 Main Menu The main menu shows 7 sub-menus. In these sub-menus groups of technical features are put together logically. Settings for bargraph and trend mode. Please refer to Chapter 6.2.1. Manual or automatic scaling. The scale of the bargraph can either be linear or logarithmic.
With the arrows (up and down) it can be determined how many decades the bargraph covers. The minimum time value is 16 seconds. The time slice is extended during the measurement mode. (Up to max. 960 s) It is displayed automatically during the AUTO mode. Softkey 3: Off The background leak rate will not be shown. Softkey 5: ? Help Softkey 7: ON The background leak rate will be shown.When using the test chamber TC1000, the test starts automatically when closing the chamber lid. This is also indicated at the display (see above). 6.4.3 technical handbook The value of the second trigger level can be set. Please refer to Chapter 4.2.2.7 Numerical Entries for the description of the entry. Please refer to Chapter 6.4.6.1 Softkey 3: Leak rate prop. The sound will be proportional to the leak rate signal. Settings of vacuum system related functions. See chapter 6.6.1 See Chapter 6.6.2 Switching between helium and hydrogen. Softkey 2: Automatic purge (UL1000 Fab only) Refer to chapter 6.6.1.1 Softkey 3: Vent delay Refer to chapter 6.6.1.2 Softkey 4: Vacuum ranges Refer to chapter 6.6.1.3 Softkey 5: Auto Leak Test adjustments Refer to chapter 6.6.1.6 Softkey 6: Leak rate internal test leak Refer to chapter 6.6.1. Page 68 Softkey 2: Immediately The inlet port will be vented immediately after pressing the STOP button. The inlet port will be vented with a time delay of 1 second. Softkey 4: After 1.5 seconds The inlet port will be vented with a time delay of 1.5 seconds. technical handbook Softkey 3: After 1 second Softkey 5. Help Softkey 6: after 2 seconds The inlet port will be vented with a time delay of 2 seconds. See Chapter 4.2.2.7 Numerical Entries for the description of the entry. Warning Normally there is no reason to edit the leak rate of the internal test leak besides after a change of the internal test leak. A wrong leak rate of the internal test leak will lead to wrong leak rate readings! 6.6.1.
Page 70 Settings: Interval: 1 - 20 sec 1 sec steps 20 - 30 sec 2 sec steps 30 - 60 sec 5 sec steps 1 - 30 min 10 sec steps 3 - 10 min 30 sec steps 10 - 30 min 1 min steps technical handbook time The measurement period (Maximum value) depends on the volume of the chamber, volume of the tested object and the rejectant leak rate. Page 72 Part under test technical handbook The number of the first part to be tested can be entered. The number counts automatically up at the next test cycle. In disable mode this function is switched off. Fig. 6-17 Reference measurement Fig. 6-18 This mode can be used to clean up the chamber after a helium contamination or after a series of failed parts. In this mode the ZERO function also can be executed manually via the ZERO button. The measured value can be displayed via hyperterminal programs. The baudrate of this printer function is set to 9600, 8N1. Connected data loggers must be set to these parameters.Softkey 2: Arrow up Adress recorder output 1 or 2 Softkey 3: Arrow down Adress recorder output 1 or 2 Softkey 5: Help Softkey 6: Arrow up Behaviour recorder output. For further information see keywords below. Softkey 7: Arrow down Behaviour recorder output. Page 78 LR lin The leak rate output voltage is scaled linear. The fundamental voltage is 0-10 V in scalable steps from 0.5 to 10 volts per decade. LR log The leakrate is recorded on a logarithmic scale. Softkey 5: ? Help Softkey 7: technical handbook The kind of the leak rate filter can be chosen. If the service message is activated, the UL1000 and UL1000 Fab reminds you of the required maintenance. Softkey 7: Arrow down technical handbook The settings of the selected saved parameter set will be displayed and can be reloaded. Thus no more Helium gets into the mass spectrometer. Helium that has gotten into the tool under test can be pumped away by the tool pump. If no extra pump is available it is recommended to vent the part before the test is continued.
Softkey 3: View internal data Information on measured internal data is provided on 4 screens. If the Device-PIN is not 0000 the UL1000 and UL1000 Fab will ask for this PIN directly after power on. Page 91 No action required. There might be a small fluctuation which is okay. The frequency changes every 400 ms from 500 Hz to 1200 Hz and vice versa so that the signal stands out well from ambient noises normally encountered. Switch off the UL1000 and UL1000 Fab. Page 97 technical handbook No. Displayed Message Description and possible solutions E47 Emission for both cathodes Signal MSIBE on MSV board is not active. Emission can not be switched can not be switched on! on. Exchange the cathode by changing the ion source. After having exchanged the ion source it must be possible to switch on both cathodes manually via the service menu. E48 Anode heater is faulty. Signal MSAFD on MSV board is active. Anode heater fuse has blown. Replace fuse F2 on the MSV board. W78 Differences of signal between The amplifier voltage difference between opened and closed calibrated test leak open and closed is leak is less than 10 mV. Page 100 Maintenance or Service at INFICON When returning equipment back to INFICON for repair or maintenance, please state whether the equipment is free of substances which pose a health hazard or if it is contaminated. If it is contaminated please state the type of hazard. A copy of this form which you may copy is printed at the end of this manual. Arctic Oil 1l 20099091 Replacement filter cell for fan 200000685 Replacement filter for venting and purge gas line 200000683 Silencer for exhaust (UL1000 Fab only) 20099183 Oil filter insert (10 pcs.) UL1000 only 200000694 Test and alignment Replace operating agent reservoir of SplitFlow 80 only in case a 3 year time period has elapsed. Page 104 Scroll module Agilent TS 620 will have to be replaced. For the D16 B in the UL1000 a refurbishment will be necessary.
Contaminated filter inserts must be exchanged since under such circumstances the cooling performance for the turbomolecular pump and the instrument itself is reduced. It is indicated in the figure above Fig. 9-2 by a black arrow. For safety reasons the exhaust filter is equipped with a valve which in the case of a blocked filter opens and passes the taken in air directly to the outside. This helps to prevent damage to the backing pump by a blocked exhaust line. Page 112 Required tools Through the oil level viewing glass of the backing pump D16B the oil level and the colour of the oil can be checked visually. The oil level of the vacuum pump must be within the minimum and maximum marks.Caution Exchange the oil always while the vacuum pump is still warm and with the vacuum pump switched off. To open the instrument, observe the instructions given in 9.6.1. Page 114 Scroll Pumps (UL1000 and UL1000 Fab only) The maintenance intervals of the maintenance plan detailed in 9.4. scroll pump (Agilent TS620) is given in the iina70e 09.fm (1408) We recommend to have this maintenance work done by the INFICON Service or a service partner authorised by INFICON. Making ease of use, leak detection efficiency and mobility within the fab environment system priorities, the UL1000 Fab provides an extremely fast leak rate response across all measurement ranges. The UL1000 Fab offers never before seen leak rate stability down to Macclesfield, Cheshire, SK10 1LT. Create one here. Creators are allowed to post content they produce to the platform, so long as they comply with our policies. United Kingdom. Company number 10637289. This technical handbook contains important informations on the functions, installation, start-up and operation of the UL1000 and UL1000 Fab. General We reserve the right to modify the design and the specified data. The illustrations are not binding. 1.11.1.
1 Notes on the Use of this HandbookSafety SymbolsImportant remarks concerning operational safety and protection are emphasised as follows: CautionInformation on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. WarningInformation on preventing extensive equipment and environmental damage. S TOP Danger Information on preventing any kind of physical injury.(0604) Skilled personnelIndicates procedures that must be performed by skilled personnel only. 1.1.2iina70e 01.fm IndicationsTip Information on helpful procedures. General Information 1-1 Notice Information on special technical requirements that the user must comply with. 1.1.3 Symbols of Vacuum TechnologyGiven in the following are some important vacuum symbols which are used in this manual. Vacuum pump in general Turbomolecular pump Measuring instrument Valve 1.1.4 Definiton of TermsAutoranging The range of the preamplifier and the vacuum ranges are selected automatically. The autoranging feature of the UL1000 Fab covers the entire range or leak rates depending on the selected operating mode. Not only the leak rate signal, but also the pressure in the test sample (inlet pressure P1) and the forevacuum pressure (P2) are used for control purposes. Range switching between the main ranges is performed via valves. Fine range switching within the main ranges is implemented by switching over the gain factor of the preamplifier. Autotune Mass alignment This function automatically aligns the mass spectrometer so that a maximum leak rate is displayed. The control processor changes the voltage which erates the ions in the selected mass range until a maximum ion current is detected by the ion detector. During each calibration the mass alignment is run automatically.(0604) iina70e 01.fm Auto zero Determination and automatic adaptation of the helium background.